High capacity vacuum pump inlet-exhaust trap for collecting heavy particulates from semiconductor manufacturing processes is available from Mass-Vac, Inc.
MV Multi-Trap 12” Vacuum Inlet Trap features all stainless steel construction and has a first stage knock-down baffle and two-stages of user selectable filter elements. Stacking two can achieve four stages of filtration capable of up to 2,500 cu.in. of solids accumulation, depending upon the process including LPCVD, PECVD, and ALD processes.
They are offered in several configurations with different port sizes and placement. Filtration options include 4.5” and 9” elements made of stainless steel gauze, copper gauze, polypropylene in 2, 5, and 20 micron sizes, Sodasorb, activated alumina, activated charcoal and molecular sieve.
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