The ACR-335UT precision rotation stage is the lowest profile rotary table with high-speed direct-drive rotary servo motor on the market. Large 335 mm center aperture and lightweight construction makes this rotary stage a suitable choice for handling 300-mm silicon wafers for semiconductor processing.
This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.
ACR-335UT has very wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and accelerate quickly to 300 rpm. Its directly coupled precision encoder resolves positions down to 0.25 arc-sec, providing lag-free, backlash-free feedback to the servo controller.
The rotor low inertia improves the start/stop behavior and velocity control significantly compared to conventional rotation stages, due to the light-weight direct-drive core-less motor. The result is precise bidirectional speed and position control, which is critical for high speed motion contouring.
These features make the ACR-335UT outperform the stability, acceleration and settling speed of traditional servo motor gear-driven mechanisms.
Precision four-point preloaded contact bearings are used to maximize performance with respect to wobble, moment stiffness, and rotating friction. A precision-machined rotating shaft further minimizes wobble.
IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.
Intellidrives, Inc.
URL: www.intellidrives.com
BRIEF INTRODUCTION
Cnbearing is the No.1 bearing inquiry system and information service in China, dedicated to helping all bearing users and sellers throughout the world.
Cnbearing is supported by China National Bearing Industry Association, whose operation online is charged by China Bearing Unisun Tech. Co., Ltd.
China Bearing Unisun Tech. Co., Ltd owns all the rights. Since 2000, over 3,000 companies have been registered and enjoyed the company' s complete skillful service, which ranking many aspects in bearing industry at home and abroad with the most authority practical devices in China.
