Intellidrives Offers Direct Drive Rotary Servo Stage
The ACR-335UT precision rotation stage is the lowest profile rotary table with high-speed direct-drive rotary servo motor on the market. Large 335 mm center aperture and lightweight construction makes this rotary stage a suitable choice for handling 300-mm silicon wafers for semiconductor processing.
This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.
ACR-335UT has very wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and accelerate quickly to 300 rpm. Its directly coupled precision encoder resolves positions down to 0.25 arc-sec, providing lag-free, backlash-free feedback to the servo controller.
The rotor low inertia improves the start/stop behavior and velocity control significantly compared to conventional rotation stages, due to the light-weight direct-drive core-less motor. The result is precise bidirectional speed and position control, which is critical for high speed motion contouring.
These features make the ACR-335UT outperform the stability, acceleration and settling speed of traditional servo motor gear-driven mechanisms.
Precision four-point preloaded contact bearings are used to maximize performance with respect to wobble, moment stiffness, and rotating friction. A precision-machined rotating shaft further minimizes wobble.
IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.
Intellidrives, Inc.
URL: www.intellidrives.com
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