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Affordable Nanometer-Precision Linear Stage Based on PiezoWalk Linear Motor

Resource from:  PI Likes:302
Jun 17,2016
An ultra-precise motor in a compact, flat stage design facilitates mechanical integration of the new N-565 linear positioner. 06/16/16, 05:27 AM | Industrial Robotics, Factory Automation PI's new N-565 compact, nanometer-precision linear stages are designed for high-end applications in bio-nanotechnology, fiber-optics, microscopy, semiconductor testing, and metrology and scientific research in beamlines and laser labs. Compact, Affordable and Nanometer Precision Due to the fully integrated linear piezo motor, the low-profile stages have a very small footprint with a width of only 65mm and length from 80mm. Travel ranges 1/2", 1" and 2" are offered in 13, 26 or 52 mm. Interferometric PIOne Linear Encoder provides Sub-Nanometer Resolution An integrated interferometric linear encoder developed by PI can resolve to 20 pm and allows incremental motion below one nanometer. Due to the short signal period of 0.5μm, the linearity error of PIOne encoders is less than 1%. PiezoWalk® Technology: Self-Clamping, High Resolution, Force, and Low Wear The PiezoWalk® technology combines the technological advantages of piezo class resolution with long travel ranges: they offer subnanometer resolution, high forces, and high stiffness. In contrast to conventional long-travel piezo-motor principles, PiezoWalk® stepping drives are not subject to sliding friction effects and virtually wear free motion is achieved, because the "legs" lift off for each step. Preloading the actuators against the runner ensures a self-clamping force even when powered down and the piezo stepping drive holds a position mechanically stable without servo jitter and energy consumption. PiezoWalk® motors were developed for the semiconductor industry over a decade ago and provide extreme reliability. Crossed Roller Bearings Provide Straight and Flat Motion With crossed roller bearings, the point contact in ball bearings is replaced by a line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller bearings are also distinguished by high guiding accuracy and load capacity. Roller creep is prevented by active cage assist. Valid Patents PI's PiezoWalk stepping drive technology is protected by the following patents and patent applications: US6800984B2, EP1267478B1, EP2209202B1, EP2209203B1, DE4408618B4, DE10148267B4 Extensive Software Support, Controller with Low Operating Voltage The PiezoWalk drive is designed to run on a maximum voltage of 45V. Several controller options are available: stand alone, OEM card, rack mount, and multi-axis controllers with coordinate transformation for parallel-kinematics applications. For start-up and system configuration, the PIMikroMove GUI is included, as well as LabView drivers and DLLs. Specifications, Datasheets, More Information > Features & Advantages Ultra-High Precision Design: 0.5nm Encoder Resolution Patented PiezoWalk® technology combines piezo-class resolution with long travel and extreme reliability Self-Locking at power off. No drift, no heat generation at position hold 3 Travel Ranges: ½", 1" and 2" Compact Design: 65mm Width, 20mm Height Standard and Custom PI has in-house engineered solutions with over 4 decades of experience working with customers to provide products that meet application demands, and can quickly modify existing product designs or provide a fully customized OEM part to fit the exact requirements of the application.
(PI)
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