Equipment Solutions Offers Voice Coil Stage
High speed, high force, sub-micron, > 300 nanometer (1.1811 10-6 in.) positioning resolution, cross roller voice coil stages are self contained, compact and can be mounted in a horizontal or vertical axis. The high speed, 20 mm (0.7874 in.) travel, Equipment Solutions' VCS-2020 Voice Coil Stage features a 20 mm dia. aperture. An integrated analog position feedback sensor assures 100 nanometer (3.937 10-6 in.) repeatability. This compact voice coil stage is suitable for such micro-positioning applications as: scanning interferometry, disk drive testing, auto focus systems, surface structure analysis, confocal microscopy, biotechnology and semiconductor test equipment. The compact 117 mm 75 mm 81 mm (4.60 in. 2.96 in. 3.18 in.), low mass, voice coil stage is a fully self-contained system including a high precision cross roller stage, voice coil actuator, analog position sensor, servo amplifier and servo controller. The low inertia cross roller stage is integral to the standard threaded "C" lens mount and motor coil for tip/tilt free motion. Custom lens mounts are available. The voice coil motor is rated at 17.8 N (4 lbs.) continuous force and 71.8 N (16 lbs.) peak for 10 seconds and is clean room compatible. For easy integration into a new or existing application the VCS-10H Voice Coil Stage has multiple sets of mounting holes on several surfaces.
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